xCy†‡DOI: lmwhite@chem.ufl.eduAbstractTungsten nitrido complexes of the form WN(NR2)3 [R = combinations of Me, Et, iPr, nPr] have been synthesized as precursors for the chemical vapor deposition of WNxCy, a material of interest for diffusion barriers in Cu-metallized integrated circuits.These precursors bear a fully nitrogen coordinated ligand environment and a nitrido moiety (W≡N) designed to minimize the temperature required for film deposition.Mass spectrometry and solid state thermolysis of the precursors generated common fragments by loss of free dialkylamines from monomeric and dimeric tungsten species.DFT calculations on WN(NMe2)3 indicated the lowest gas phase energy pathway for loss of HNMe2 to be β-H transfer following formation of a nitrido bridged dimer.Amorphous films of WNxCy were grown from WN(NMe2)3 as a single source precursor at temperatures ranging from 125 to 650 °C using aerosol-assisted chemical vapor deposition (AACVD) with pyridine as the solvent.Films with stoichiometry approaching W2NC were grown between 150 and 450 °C, and films grown at 150 °C were highly smooth, with a RMS roughness of 0.5 nm.

In diffusion barrier tests, 30 nm of film withstood Cu penetration when annealed at 500 °C for 30 min.Supporting InformationGeneral experimental procedures.Modified procedures for synthesis of WN(OtBu)3 and 1.Procedures for thermolysis of 1 and 2.Variable temperature 1H NMR spectra for 7, 9, 10, and 11.X-ray experimental procedure, tables of crystal data and structural refinement, tables of bond distances, bond angles, positional parameters, and anisotropic displacement parameters for 2 and 7..View: ACS ActiveView PDF | PDF | PDF w/ Links | Full Text HTML PDF ja4117582_si_001.pdf (766.1 kB) Crystallographic Information File ja4117582_si_002.cif (31.6 kB) ja4117582_si_003.cif (18.38 kB)Specialty Gear Baby Clothing Big & Tall Boots Camouflage Cell Phone Cases Gnomes Helmets Can Coolers Scrubs Snapback Hats Vintage Clothing Shop by SportBaseball GearBasketball GearFootball GearGolf Gear Gymnastics Gear LacrosseSoccer GearSoftball GearSwimming and Diving GearTennis GearTrack and Field GearVolleyball GearWrestling Gear Georgia Bulldogs Sweatshirt and Hoodies at the Official UGA Fan Shop Shop the Official University of Georgia Shop for the best UGA Sweatshirts for all fans and alumni.

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